Electron Beam Lithography (EBL) Tool

What the buyer is asking for

Lund University, Department of Physics, Lund Nano Lab is acquiring an Electron Beam Lithography Tool. The instrument is intended for high resolution, repeatable patterning, equipped with a large writing field for high throughput patterning, and automated self-calibration routines to support long exposures with minimal errors due to beam drift. Finally, its flexible sample loading system must be configured for a wide range of samples from small pieces used for basic science, or wafers up to 8" in diameter for pilot production testing. With these properties, the Electron Beam Lithography Tool will become a central part of the Lund Nano Lab fabrication infrastructure and support a range of applications such as quantum devices, high-power electronics, metasurfaces and more. In addition to the instrument, the tender must include all associated costs such as warranty, packaging, insurance, on-site installation, commissioning, FAT, SAT, duty and transportation, training, documentation, support, development/software updates, charges under the Ordinance on Producer Responsibility for Packaging (2022:1274) etc.

How this compares

• This is one of 33 open tenders in Sweden for Laboratory, optical and precision equipments (excl. glasses).
• Its stated value is higher than 78% of the 32 open tenders in this category that state a value in SEK.
• Bidders were given 29 days from publication to the deadline; the median for open tenders in Sweden is 30 days.

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